Chief Technologist and VP R&D, Silex Microsystems
Thorbjörn “TOBY” Ebefors, PhD
Chief Technologist at SILEX Microsystems AB, Sweden
Co-Founder, Corp VP R&D and acting IP portfolio manager
In current position since January 2011; employed with Silex since 2000
Born 1970 married with Leena and have 2 daughters
IEEE senior member.
Toby Ebefors, has more than 20 years of experience in the MEMS industry. He received his M.Sc. degree in Electrical engineering and applied physics from Linköping Institute of Technology (LiTH), Sweden 1994 and his PhD degree in 2000 (Thesis title: Polyimide V-groove joints for Three-dimensional Silicon Transducers) from KTH, Stockholm, Sweden.
Dr. Ebefors is inventor or co-inventor to some 30+ patents and patent-pending applications in the field of MEMS and TSV technologies. He co-founded Silex with four fellow MEMS experts from KTH and Acreo Institute in 2000 and has had several different positions in the company since then. SILEX has been ranked as no #1 pure play MEMS foundry last 5 years by Yole.
Before founding Silex in 2000, he was first PhD student and then research associate at the MST group at Royal Institute of Technology (KTH), Stockholm Sweden. His research background is in the field of MEMS based silicon sensors and actuators, especially 3D based MEMS devices for fluid dynamic measurements and micro-robotics applications where he had supervised several MSc and PhD students. He has also been involved in teaching undergraduate and graduate students, especially courses in electrical measurement techniques, modern Sensor and MicroSystemTechnology and MEMS-fabrication. During 2002-2005 he hold the position as project manager for several of Silex’ early customer programs using the Sil-Via(R) TSV technology. Dr Ebefors also has extensive experiences from MEMS process design in general and TSV design in particular from his time as Silex Director of MEMS Design between 2005 and 2011.
Currently he holds the position as Chief Technologist with the responsibility for Silex research programs on new advanced MEMS nano-materials in the magnetic and piezo electric domains as well as project coordinator for new TSV (Met-Via(R) technology), TGV and TMVs related 3D MEMS R&D projects. He also coordinates SILEX R&D activities in strategic EU programs related to new energy harvesting developments. He is the principle scientific coordinator of the 8,2 m€ H2020 consortium smart-MEMPHIS that is developing novel energy harvesting solutions. Previously Dr. Ebefors has been steering board member in several EU projects including CAJAL4EU (focusing on Heterogeneous integration of CMOS biosensors with TSV Interposers), EPAMO (tight pitch RF TSV and TSV based 3D RF IPDs), PROMINENT (new manufacturing techniques using Ink-jet printing for novel functional nano materials), INCITE (novel integration approaches for TSV and p-MUTs for ultrasound imaging demonstrators) all partly funded by the EU ENIAC Joint Undertake were Silex collaborate with leading European partners. Toby and his co-authors was awarded best conference paper at IWLPC 2013.
He is also a hobby ski instructor since more than 10 years and like to ski in deep snow conditions all over the word.